| 摘要 |
PURPOSE:To realize a rapid elution and to enhance the stability with time, by a method wherein an eluant for non-ink accepting parts of a lithography is prepared by incorporating at least an alkali agent and a compound shown by a specific general formula. CONSTITUTION:An eluant for pressplate is prepared by dissolving at least an alkali agent and a compound shown by a formula I (R represents alkyl or aryl) in a solvent. As the aforesaid alkali agent, sodium hydroxide, potassium hydroxide, sodium silicate, tribasic sodium phosphate, dibasic sodium phosphate, sodium carbonate, or others is used preferably with an addition amount of the order of 0.03-10wt.%. The use of the obtained eluant for pressplate allows a remarkably rapid elution and the formation of a resist of high sharpness and plate wear, and the eluant has a superior stability with time.
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