| 发明名称 |
Silicon carbide capillaries |
| 摘要 |
A capillary for use in ball bonding tools designed to bond metal leads to the bonding pads on a microchip and pads or leads on a chip support is formed by chemically vapor depositing a substantially smooth silicon carbide coating having high electrical resistivity onto a substrate which is then removed by etching or combustion.
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| 申请公布号 |
US4772498(A) |
申请公布日期 |
1988.09.20 |
| 申请号 |
US19860933007 |
申请日期 |
1986.11.20 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
BERTIN, ROBERT;MILLER, MICHAEL B.;MOON, BURL M.;POST, ROBERT C. |
| 分类号 |
H01L21/607;B23K20/00;C23C16/01;C23C16/32;H01L21/60;(IPC1-7):B23K1/00;B23K3/00 |
主分类号 |
H01L21/607 |
| 代理机构 |
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代理人 |
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| 主权项 |
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