| 摘要 |
PURPOSE:To obtain a pulsive large current electron beam, by arranging a generating electrode for creeping discharge or silent discharge in the vicinity of a main cathode of an electron beam generating source for X-ray generation. CONSTITUTION:A laser gas 2 is introduced between main electrodes 1 and 1' for excitation, and excited by discharge applying an electric power source 3. Almost simultaneously or previously, an X-ray generating equipment is started, and the generated X-ray is made an incidence to pre-excite a laser gas in a main discharge region 4. A dielectric material 8 for creeping discharge is installed neighboring with a main cathode 5 for generating an electron beam, and an auxiliary discharge electrode 9 is arranged. By applying a pulse voltage between the main cathode 5 and the auxiliary electrode 9, creeping discharge is generated on the surface of the dielectric material 8. by applying a voltage between the main cathode 5 and a target 6, a lot of electrons are taken out which are made to collide against the target 6 to produce X-ray 12. Thereby, a stabilized X-ray source for auxiliary excitation can be obtained. |
