| 摘要 |
PURPOSE:To shorten the length measurement stroke of a body to be measured which has the large open angle of a lens and to reduce the size of a measuring instrument by setting a scale with polar coordinates based on the center of curvature of a curved surface to be measured as a coordinate origin, scanning a probe by swiveling along the curved surface to be measured, and measuring the surface shape of the curved surface to be measured by using the scale. CONSTITUTION:The focusing state decision optical system 42 of the automatic focusing microscope 20 of a surface shape measuring instrument detects the focusing state of the body 30 to be measured on an objective 41 and a driving motor 17 is driven according to the state to move the microscope 20. This measuring instrument is provided with a tilt angle measurement optical system 43 and sensors 44 and 45 are arranged on the optical systems 42 and 43. Further, the body 30 to be measured is supported on an indexing bearing 8 and the probe is swiveled by a swiveling means fitted to a surface plate along the curved surface to be inspected. Then the swivel angle theta between the swiveling means and the probe or body 30 to be measured is measured and the quantity of shifting in relative position of the probe from the curved surface to be measured in a (y) direction to set the scale with the coordinate system y-theta based upon the center of curvature to be inspected of the curved surface to be inspected as the coordinate origin.
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