| 摘要 |
PURPOSE:To accurately reproduce the surface shape of a surface to be inspected by integrating a tilt angle signal indicating the inclination of the surface to be inspected to a specific reference surface for a time corresponding to a sampling time when the distance of the surface to be inspected from the reference surface is measured, and using this value as tilt angle data. CONSTITUTION:The tilt angle signal is integrated for the time corresponding to the sampling interval of shape data to obtain the tilt angle data. Namely, the output signal of the optical sensor 30 of a tilt angle measurement optical system 4 is inputted to an integration circuit and integrated successively for the sampling interval correspondence time (t) of shape data DELTAx to output the tilt angle signal integrated timed with shape data extraction at the time of measurement, i.e. a signal alpha' corresponding to the tilt angle data. This tilt angle data alpha' indicates the representative angle of a specific area in the surface to be inspected corresponding to the sampling time (t) as shown by an arrow. Consequently, the projection and recess shape of the surface to be inspected which is restored by using the tilt angle data alpha' conforms excellently with the shape data shown by a broken line in a diagram.
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