| 摘要 |
PURPOSE:To regenerate a moisture sensing element by heat, by electrically energizing an electrode plate formed on the moisture sensing element. CONSTITUTION:A moisture sensing element 3 is formed on a platinum thick film 2 as the first electrode plate formed on a ceramic base substrate 1. Moreover, a heater thick film 4 is formed thereon as the second electrode. Then, a part where the platinum thick film 2 of the base substrate 1 is formed is surrounded by four clearances 5. Conducting thick films 7 are connected respectively to the platinum thick film 2, the moisture sensing element 3 and the heater thick film 4. Changes in the electric resistance of the moisture sensing element 3 due to changes in the moisture of a gas are extracted with the platinum thick film 2 and the heater thick film 4 to cause a change in the electric resistance between terminal plates 8 and 9. To regenerate the moisture sensing element 3 with characteristic degraded caused by steam and dust attached in the gas, a specified voltage is applied between the terminal plates 9 and 10. Thus, Joule heat is generated in the heater thick film 4 to heat a heating part 11.
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