发明名称 |
MULTI-CATHODE METAL VAPOR ARC ION SOURCE |
摘要 |
An ion generating apparatus utilizing a vacuum chamber, a plurality of cathode (250) located on a movable portion of a support member and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. |
申请公布号 |
AU1277988(A) |
申请公布日期 |
1988.09.15 |
申请号 |
AU19880012779 |
申请日期 |
1988.03.08 |
申请人 |
I.G. BROWN |
发明人 |
IAN GORDON BROWN;ROBERT ALLAN MACGILL |
分类号 |
H01J27/08;H01J27/14;H01J37/08;H01J37/30 |
主分类号 |
H01J27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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