发明名称 MICROMOTION ACTUATOR
摘要 Apparatus is disclosed for supporting an optical element which can move the element in an extremely precise, tilt-free translation in a straight line over a distance of one-half a wavelength of visible light. The invention comprises in one embodiment a piezoelectric transducer mechanically coupled to a flexure tube using hardened conical points.
申请公布号 DE3473343(D1) 申请公布日期 1988.09.15
申请号 DE19843473343 申请日期 1984.09.10
申请人 ZYGO CORPORATION 发明人 SOOBITSKY, JAMES A.
分类号 G12B5/00;G01B9/02;G01J9/02;G12B1/00;H01L41/053;H02N2/00;(IPC1-7):G01B9/02 主分类号 G12B5/00
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