| 摘要 |
PURPOSE:To increase corrosion resistance to chemical medicine, to improve electric characteristics and to enhance the reliability of an infrared detector by ion milling a substrate surface by irradiating accelerated gas to the substrate to form a passivation layer. CONSTITUTION:A mercury-cadmium-tellium substrate 11 is mounted on a substrate mounting base 13, and a vessel 12 is evacuated. Then, Ar gas is introduced into the vessel 12, a voltage is applied between a cathode 14 and an anode 17 to accelerate electrons, and the electrons are spirally moved by a magnet 18 to set the Ar gas to a plasma state. Further, a negative voltage is applied to a grid 18 to accelerate Ar ions stored with positive charge. After the Ar ions are passed through the grid 19, they are electrically neutralized by thermions, collided with the substrate 11 to ion mill the substrate 11 to form an ion milling layer 21A to be used as a passivated layer. Then, a supporting plate 22 is bonded, a passivated layer 21B is formed on the surface of the substrate 1 under the similar conditions, and electrodes 23, 24 are formed thereon.
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