| 摘要 |
PURPOSE:To independently obtain two-dimensional image information in picture element units with inexpensive one dimensional sensors and detect marks surely by using two-dimensional to one-dimensional conversion fibers for detection systems. CONSTITUTION:Marks 9 put by a marker 4 on an object 8 to be measured are magnified to about twice by the first detection system along with traveling of the object 8 and are imaged on optical fibers 1 of which one end is made into a shape of two- dimensional arrangement and the other end into that of one-dimensional arrangement. The fiber cores of the one-dimensional arrangement thereof and the respective elements on a linear sensor 2 are opposed one to one and photodetection is accomplished. The same holds true of the second detection system. The binary coded signals removed of background shadows from the output signals of the sensors 2 via a preamplifier 3, a differential amplifier 11, and a comparator 13 are inputted to a spacing measurement circuit 15. The spacing between the two detection systems, the time spacing and the mark time spacing are detected, and the measurement for the marks is performed by operation with a microcomputer through a bus line 17. Thereby, the marks 9 are surely detected by using the inexpensive one-dimensional sensors 2. |
