| 摘要 |
PURPOSE:To efficiently coat a substrate surface with a carbonaceous film containing diamond crystals and amorphous carbon having excellent adhesive property, by carrying out vapor deposition of carbon and irradiation of ion beams for the substrate in a vacuum. CONSTITUTION:The interior of a vacuum vessel is evacuated to about 10<-5>-10<-7>Torr and vapor deposition of carbon 12 from an evaporation source 8 is carried out. The substrate 4 is simultaneously, alternately therewith or intermittently irradiated with ion beams 18 from an ion beam source 16. One or more of inert gases, such as He, hydrocarbon based gases and organic compound based gases are used as a gas (G) fed to the above-mentioned ion beam source 16. The ratio of the amount of irradiated ions to that of carbon deposited on the substrate 4, i.e. ion/carbon is about 1-100%. As a result, the aimed carbonaceous film containing diamond crystals mixed with amorphous carbon with hardly any uneven distribution is prepared on the surface of the substrate 4. Since treatment can be carried out at a low temperature by this invention, the range of material usable as the substrate is remarkably extended and mechanical characteristics of the afore-mentioned film are readily controlled.
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