SILICON NITRIDE FILMS FOR INTEGRATED CIRCUITS,申请号EP19850309262-传众专利搜索

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发明名称	SILICON NITRIDE FILMS FOR INTEGRATED CIRCUITS
摘要
申请公布号	EP0186443(A3)	申请公布日期	1988.09.14
申请号	EP19850309262	申请日期	1985.12.19
申请人	ADVANCED MICRO DEVICES, INC.	发明人	FOROUHI, ABDUL R.;ALLEN, BERT L.
分类号	C23C16/34;C23C16/48;H01L21/318;H01L29/788;(IPC1-7):H01L21/318	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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