| 摘要 |
PURPOSE:To obtain a glass article having the original appearance of the base glass and extremely stable against mechanical abrasion and chemical corrosion, by coating a glass article with a thin amorphous silicon film having a thickness falling within a specific range. CONSTITUTION:A glass article heated at 250-700 deg.C is made to contact with a chloropolysilane (e.g. hexachlorosilane) diluted with an inert gas such as Ar to a concentration of <=5vol.%. A glass article coated with amorphous silicon film having a thickness of 50-2,000Angstrom can be produced by this process. The heating of the glass article is carried out by using laser, ultraviolet radiation or plasma.
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