发明名称 Method of coating copper conductors on polyimide with a corrosion resistant metal, and module produced thereby
摘要 A module, for interconnecting integrated circuits, is comprised of a substrate, a layer of polyimide disposed thereon, and a plurality of spaced apart copper conductors on the layer of polyimide. This module is dipped into a solution of palladium chloride, thereafter it is dipped into a solution of sodium hydroxide, and thereafter it is dipped into an electroless plating solution for cobalt. As a result, a film of cobalt is deposited on all exposed surfaces of the copper conductors, but no cobalt is deposited on the exposed polyimide surface between the conductors. This cobalt film protects the copper conductors from corrosion, and it does not short the conductors together.
申请公布号 US4770899(A) 申请公布日期 1988.09.13
申请号 US19870060234 申请日期 1987.06.10
申请人 UNISYS CORPORATION 发明人 ZELLER, FAITH M.
分类号 C23C18/16;C23C18/18;C23C18/30;C23C18/31;C23C18/34;H01B13/00;H01B13/16;H01L21/48;H05K3/18;H05K3/24;(IPC1-7):B05D5/12 主分类号 C23C18/16
代理机构 代理人
主权项
地址