| 摘要 |
PURPOSE:To make a device in a compact size by providing a jet pump which consists of a nozzle for ejecting high pressure driving fluid in a sealing gas supply pipe, and a mixing chamber which induces gas surrounding the nozzle. CONSTITUTION:The end, located in a vapor trap 46, of a high pressure sealing gas leading pipe 41 is formed in nozzle 42 the inner diameter of which is tapered. Sealing gas 50 is in form of an ejecting flow to generate negative a pressure when the gas comes out of the nozzle 42. A part 16c of cover gas 16b led in the vapor trap 46 is induced in the portion under a negative pressure and sealing gas 50 and the cover gas 16b are mixed with each other to become sealing gas 51. Thereby, a volume of sealing gas supplied the outside of from the device can be reduced.
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