Multiple density mask and fabrication thereof,申请号US19870000212-传众专利搜索

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发明名称	Multiple density mask and fabrication thereof
摘要
申请公布号	US4770947(A)	申请公布日期	1988.09.13
申请号	US19870000212	申请日期	1987.01.02
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	FLAGELLO, DONIS G.;SHAW, JANE M.;WITMAN, DAVID F.
分类号	G03F1/00;G03F1/08;G03F1/14;H01L21/027;(IPC1-7):B32B15/00	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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