| 摘要 |
PURPOSE:To execute sticking with high accuracy and with high efficiency by forming a pattern for measuring a sticking position and sticking accuracy of a photomask use pellicle. CONSTITUTION:A pellicle use alignment mark 1 for measuring a sticking posi tion and sticking accuracy of a photomask use pellicle 3 is formed on a photomask 2. An allowable value (a) of the sticking accuracy of the photomask use pellicle 3 is set to, for instance, 0.3mum. In such a way, with respect to the photomask 2, the photomask use pellicle 3 can be installed easily in a correct position, and also, the sticking accuracy of the photomask use pellicle 3 can be measured. Especially, by placing several kinds of allowable values (a), the sticking accuracy can be measured more minutely. |
