发明名称 Method of manufacturing valve element for use in an ink-jet printer head
摘要 A photoresist and etch method is used to manufacture valve elements of an ink jet printer. The method involves the building of successive layers upon a substrate, with the layers including conductive spacer layers which may be dissolved and plated layers that resist the dissolving. The resulting structure is a very small structure manufactured to extreme accuracy.
申请公布号 US4770740(A) 申请公布日期 1988.09.13
申请号 US19870081876 申请日期 1987.08.05
申请人 NEC CORPORATION 发明人 TSUZUKI, MITSUO;SUGA, MICHIHISA
分类号 B41J2/175;F15C5/00;F16K15/14;F16K99/00;(IPC1-7):B44C1/22;C23F1/00;B29C37/00;C03C15/00 主分类号 B41J2/175
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