摘要 |
PURPOSE:To obtain a thin film magnetic head having a conductor which excels in the adhesive strength to an insulating layer by forming a conductor part into three-layered structure in which the lowermost layer is formed of 'Permalloy(R)', the intermediate layer of Au and the uppermost layer of 'Permalloy(R)' and specifying the thicknesses of the 'Permalloy(R)' films for the uppermost and lowermost layers to <=1,000Angstrom . CONSTITUTION:This head consists of the lower 'Permalloy(R)' layer 11 for intensifying the adhesive strength to the lower insulating layer of the conductor, the Au layer 12 and the upper 'Permalloy(R)' layer 13 for intensifying the adhesive strength to the upper insulating layer of the conductor. The film thicknesses of the lower 'Permalloy(R)' layer 11, the Au layer 12 and the upper 'Permalloy(R)' layer 13 are set at 100Angstrom , 300Angstrom and 100Angstrom , respectively. The surface roughness of the conductor is about 1/2 the surface roughness of the conventional conductor and the specific resistance after a heat treatment is 3/4 the specific resistance of the conventional conductor when the specific resistances and surface roughnesses after the formation of the conductor and after the heat treatment are compared to the characteristics by the conventional conductor. The good conductor having a small calorific value is thus obtd. The good conductor which has the small specific resistance and surface roughness, permits control of the calorific value during energization for its low specific resistance, is less deteriorated in the specific resistance and surface roughness even after the heat treatment and has the high adhesive strength between the conductor and the insulating layers formed to the upper and lower parts of the conductor is thereby obtd.
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