| 摘要 |
PURPOSE:To obtain the titled body having less tendency for generating a flaw on the surface of the titled body, even in case of repeated use, and the excellent weatherability by providing with a protective layer which is formed by a glow- discharging method and is composed of an amorphous hydrocarbon film contg. at least halogen atom and group V atoms of the periodic table of elements in the titled body. CONSTITUTION:The titled body is constituted of a monolayer composed of a selenium- arsenic alloy or a laminated layer laminated selenium and selenium-tellurium alloy in this order on a conductive substrate plate 3. The titled body is provided with the surface protective layer 1. The protective layer 1 is formed by the glow charging method and is composed of the amorphous hydrocarbon film contg. at least the halogen atom and the group V atoms of the periodic table of elements. The surface protective layer 1 having the excellent sticking and moisture resisting properties and less tendency for generating the flaw and the improved hardness is obtd. by incorporating the halogen atom in the surface protective layer. And, the surface protective layer 1 having surely suitable electrification and excellent translucent property is obtd. by incorporating the group V atoms of the periodic table of elements together with said halogen atom in the surface protective layer. |
