POSITIVE TYPE RESIST COMPOSITION FOR ELECTRON RAY OR X-RAY

摘要

PURPOSE:To improve resolving power and sensitivity by using a compsn. contg. a quinone diazide compd. and specific cresol-formaldehyde novolak resin at specific ratios. CONSTITUTION:This compsn. contains the quinone diazide compd. and the cresol-formaldehyde novolak resin. This resin is the cresol-formaldehyde novolak resin which is obtd.. by addition condensation of mixed meta-, para-cresols at a ratio of meta-cresol/para-cresol=20/80-60/40 (by weight) and formaldehyde and has 2,000-15,000 weight average mol.wt. The ratio of the quinone diazide compd. and the resin is in a 1:2-1:5 (by weight) range. The resist compsn. which is balanced in sensitivity and resolving power is thereby obtd.