发明名称 MATERIAL-HANDLING EQUIPMENT IN CLEAN ROOM
摘要 <p>PURPOSE:To enhance the safety of working as well as to accurately stop at the intended place or at an arbitrary position by a method wherein a supported material is lifted up by a telescopic arm device, and the material is carried by driving a linear pulse motor. CONSTITUTION:Holding means 27A and 27B are separated, a telescopic arm device 15 is contacted to and stopped at the upper part of a material receiving device and a holding device 20 is lowered by extending the telescopic arm device 15 downward using a driving device 19. Then, the holding means 27A and 27B are moved adjoiningly by a motor and a lever 31, or a spring 42 and electromagnetic attraction means 43A and 43B, and a case 35 is lifted up to the uppermost limit by raising the telescopic arm device 15. The movable body 8 with which the linear pulse motor in a duct 4 will be used is travelled, the movable body 8 is carried to the upper part of a material-receiving device 34 by setting the number of pulse, it is stopped at the place of stopping accurately, and the case 35 is unloaded to the material-receiving device 34 by performing the operation in the reverse order to that conducted when the material is received.</p>
申请公布号 JPS63219135(A) 申请公布日期 1988.09.12
申请号 JP19870052782 申请日期 1987.03.06
申请人 DAIFUKU CO LTD 发明人 HAYASHI TAKEHIDE
分类号 B61D27/00;B25J11/00;B65G54/02;H01L21/677;H01L21/68 主分类号 B61D27/00
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