| 摘要 |
PURPOSE:To produce the title colorless and transparent thin film used as the optical thin film, by controlling the (x) in the molecular formula of TiOx to 1<x<2. CONSTITUTION:The thin-film titanium oxide material is expressed by the molecular formula of TiOx (where 1<x<2). Since the novel material is in the form of a thin film and the analysis of the O atom is difficult, (x) can not be identified. However, the novel material is obtained by using TiO as the vaporization source, introducing a small amt. of gaseous O2 into a vacuum chamber, and then carrying out vapor deposition, the TiO is purpled, and the novel material is colorless and transparent and is not electrostatically charged although TiO2 is charged. Accordingly, the (x) in the TiOx of the novel material must be in the range of 1<x<2. The novel material is colorless and transparent and has nd=2.2-2.4, and the thin film has excellent adhesion to a plastic substrate and excellent resistance to moisture and scuffing. Consequently, a multilayer optical element having desired optical characteristics can be obtained by forming the thin film on a substrate.
|
