ANALYZING DEVICE FOR PARTICLE IMAGE

摘要

PURPOSE:To obtain the feature value of a particle image in real time by using a real time 1-path type method which supplies continuously images in a raster scan type and completing the processing of the defective images every time a defect is detected in those input images. CONSTITUTION:The interim results of the feature value are stored in memory circuits 15a and 15b which use the numbers added successively to cross parts for each scan line as addresses. Thus the degrees of freedom are secured at the writing and reading time points of the interim results. A sequence circuit 11 is added to digitize the images and uses two picture element data adjacent to each other over two continuous scan lines as inputs so that a proper calculation control signal is produced for a more diversified partial pattern form. In addition, similar picture deformation due to the reverse raster scan is combined with AND processing so that the deformation of images is reduced down to a minimum necessary level where only a hole and a lower recess part in a particle image are filled by '1'. Thus it is possible to greatly reduce the probability for mismeasurement due to the superposition of particle images.