摘要 |
PURPOSE:To pre-ionize a main discharge region between main electrodes uniformly, and to improve efficiency and lengthen a lifetime by using a cathode for generating X-rays as a hot cathode, stably generating electrons and forming an anode for generating X-rays to a shape that X-rays are reflected. CONSTITUTION:An anode 5 for generating X-rays, a heat shielding plate 6 and a heater 7 are mounted at the rear of a main discharge electrode 1, a control electrode 8 is set up near the anode 5 for generating X-rays, and these electrodes, plate and heater are unified with a main discharge electrode 1' while being covered with an insulating vacuum vessel 9. When a capacitor 14 is charged from a high voltage power and high voltage pulses are applied between the heater 7 as a cathode for generating X-rays and the anode 5 for generating X-rays through a resistance element 12 by a switching element 13, the generation of X-rays is equalized, and a main discharge region between the main electrodes 1, 1' can be pre-ionized uniformly. Accordingly, efficiency is improved, and a lifetime is lengthened. |