| 摘要 |
PURPOSE:To enhance reliability by forming a thin ferromagnetic metallic film layer on a substrate while blowing an oxidizing gas to the section where the surface part of the thin ferromagnetic metallic film layer is formed and forming a layer contg. an oxide to the surface part of the thin film layer. CONSTITUTION:The substrate 1 which is a polyimide film delivered from a delivery roll 5 is transferred along a cylindrical can roll 7 heated at 250 deg.C in a vacuum vessel 5 in which a high vacuum is maintained by a vacuum evacua tion system 4; thereafter, the substrate is taken up by a take-up roll 8. An evaporation source 9 consisting of a Co-20at.% Cr alloy provided in the lower part of the roll 7 is heated to evaporate the ferromagnetic metal. The incident angle of the vapor flow of the ferromagnetic metal on the substrate 1 which is the polyimide film is controlled by a deposition preventive plate 10; in addi tion, gaseous oxygen is blown from a gaseous oxygen introducing port 11 toward the part P where the surface part of a perpendicularly magnetized film is formed to maintain the forming speed of the film at >=500A/s, by which the magnetic recording medium having the perpendicularly magnetized film is pro duced. A floppy disk having 5 inch diameter is thereafter produced by blanking such medium.
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