| 摘要 |
PURPOSE:To feed a group V element to closed space without damaging stoichiometry of raw material melt, by communicating a closed container with a reservoir packed with a III-V compound by a connecting pipe. CONSTITUTION:Raw material melt 3 covered with a liquid encapsulating agent 7 is fed to a crucible 12 having formed a periphery rotating liquid reservoir 10' placed in a pressure container 23 and the lower peripheral edge of a closed container 6 is immersed in the liquid encapsulating agent 9 packed in the liquid reservoir 10' to form closed space 5. Then the container 6 is communicated with a reservoir 1 containing a III-V compound 2 by a connecting pipe 4 equipped with a filter 5 having an intermediate range temperature W heated to a temperature Tw which is lower than the melting point Tm of the III-V compound and higher than the vaporizing point Tv of group V element. The III-V compound in the reservoir 1 is heated by a heater 20, vaporized, passed through the filter 5 in the connecting pipe 4, subjected to pressure loss of gas to reduce velocity and fed to the container 6.
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