发明名称 GAS PHASE ION SOURCE
摘要 PURPOSE:To prevent the deterioration in the electric field intensity applied to the tip of an emitter by a heat reflecting tube and improve the ion generation efficiency by applying the potential different from an extracting electrode to the heat reflecting tube. CONSTITUTION:The extracting voltage of 30KV is applied across an emitter 1 to generate ions and an extracting electrode 6, and the auxiliary voltage of about 20KV is applied across the emitter 1 and a heat reflecting tube 12. Thereby, a potential difference of 10KV exists between the extracting electrode 6 and the heat reflecting tube 12, thus the electric field formed between the emitter 1 and the extracting electrode 6 enters deeply to the emitter 1 side. Accordingly, the electric field strength applied to the tip of the emitter 1 is not weakened by the heat reflecting tube 12, thus the ion generation efficiency can be improved.
申请公布号 JPS63216247(A) 申请公布日期 1988.09.08
申请号 JP19870048182 申请日期 1987.03.03
申请人 JEOL LTD 发明人 OBATA MUTSUNORI
分类号 H01J27/26;H01J37/08 主分类号 H01J27/26
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