| 摘要 |
PURPOSE:To synthesize homogeneous diamond film over wide area on a substrate, by feeding a mixed gas of hydrocarbon and hydrogen through a porous nozzle to a planer heater in a vacuum vessel, thermally decomposing part of the gas and subjecting the gas to plasma generation. CONSTITUTION:A porous nozzle 2, grid-like filament 3, cathode 5, anode 6, substrate 7, etc., are arranged in a vacuum vessel 1. Then a mixed gas of hydrocarbon and hydrogen is fed through a pipe 12 to a porous nozzle 2 to afford homogeneous and planar mixed gas, which is then passed through a grid-like filament 3 to thermally decompose part of the mixed gas. Then the mixed gas passed through the grid-like filament 3 is subjected to plasma generation in a space between the cathode 5 and anode 6 to synthesize the aimed diamond on a substrate. Thus the diamond can be synthesized without carry ion or electron to the substrate 7 in large amounts and temperature control on the substrate surface is readily carried out.
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