| 摘要 |
PURPOSE:To achieve a higher measuring accuracy, by tilting a section by a specified value when the inclination thereof is too large. CONSTITUTION:When abnormal sampling points SP are detected with an absolute value of (Va-Vb)/(Va+Vb) (values Va and Vb are outputs of detectors 3a and 3b) exceeding a specified numeral, a profile PF is prepared for the front and rear parts thereof excluding the points. Subsequently, the direction of a section and that of an electron beam 2 are tilted by a specified angle phirelatively in the positive or negative way according to the polarity, positive or negative, in said formula from the direction at the right angle to one another. Regarding the point SP with the absolute value of the value of the said formula reaching a specified value, the relative angle between the section 1 being measured and a beam 2 is varied by +phi or -phi to execute a measurement of this relatively inclined section 1 at a specified number of sampling points containing the point SP. Then, after an inclination PF of the portion is prepared, the angle phi is restored from the inclination PF to synthesize a comprehensive PF.
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