| 摘要 |
PURPOSE:To perform the monitoring and nonmonitoring of a beam without moving a Faraday cup in parallel by providing a hole and a rotary shaft on the side face of the cylinder body of the Faraday cup, rotating the rotary shaft, and passing the beam through the hole. CONSTITUTION:At the time of the beam monitoring, a beam guide port 3 is directed to a beam line 1, thereby a beam enters a Faraday cup, and the current is measured through a cable 9 and a current guide terminal 10. At the time of the nonmonitoring, a rotary guide terminal is operated from the outside of a vacuum container 2, a rotary shaft 6 is rotated by 90 deg., and a hole 4 is directed to the beam line 1 to pass the beam. Accordingly, the beam can be guided to the aimed position in the downstream area.
|
