| 摘要 |
PURPOSE:To surely position substrates of different sizes or shapes in a prescribed holding position by a method wherein a positioning member is inserted into a positioning hole interlinked with a vent hole which feeds a negative- pressure gas to two or more suction parts so that the negative-pressure gas passing through the vent hole can be sealed. CONSTITUTION:At a holder 1 which positions and holds substrates 10A-10C in a prescribed position at a stand 1A while the substrates 10A-10C are brought into contact with positioning members 12, 15, 16 formed on the surface of the stand 1A, the following are installed: two or more suction parts 2A-2C formed on the surface of the stand 1A; a vent hole 5 which is made inside the stand 1A to feed a negative-pressure gas to the two or more suction parts 2A-2C; positioning holes 11A-11C which are made on the surface of the stand 1A to be correspondent with the two or more suction parts 2A-2C and are interlinked with the vent hole 5. When the positioning members 12, 15, 16 are inserted into the positioning holes 11A-11C, the vent hole 5 is sealed, as a result, the negative-pressure gas can be fed selectively to the suction parts to suck the substrates 10A-10C which have been positioned by the positioning members 12, 15, 16. |
