| 摘要 |
PURPOSE:To suppress a decrease in transmittance as far as possible and to obtain an optical element which is wave-optically perfect by forming the element into a non-free standing structure in which parts to be transparent to X-rays are also supported by an X-ray transmittable supporting film. CONSTITUTION:The X-ray optical element has the thin supporting film 10 having good transmittability of X-rays and a layer 12 of a prescribed pattern consisting of an X-ray absorptive material formed on the film 10. The film 10 is formed of a material such as, for example, Be, C, BN, silicon nitride, silicon carbide or Mg. On the other hand, the X-ray absorptive material is formed of, for example, Ta. The film 10 is as thin as possible, while the pattern 12 of the X-ray absorptive material has the thickness necessary for absorbing the X-rays. Further, the circumference of the surface of the film 10 on the side opposite from the pattern 12 is supported to a supporting frame 14 which has no transmittability of X-rays. The pattern 12 is thereby held without deflecting the same.
|
