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发明名称
摘要
申请公布号	JPS63135975(U)	申请公布日期	1988.09.07
申请号	JP19870029088U	申请日期	1987.02.27
申请人		发明人
分类号	C30B15/02;C30B15/10;C30B27/02;C30B29/06;H01L21/18;H01L21/208;(IPC1-7):C30B15/02	主分类号	C30B15/02
代理机构		代理人
主权项
地址

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