发明名称 INSULATED GATE TYPE SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
摘要 A semiconductor device has an insulated gate type transistor. The insulated gate type transistor is formed on an insulating surface (5) of substrate (4). The insulated gate type transistor is formed in a single crystal layer (8) which is grown from a single nucleus (6) formed on nucleation region which is provided on said insulating surface (5), which has sufficiently greater nucleation density than material of said insulating surface and which has sufficiently small size so that only one nucleus can be grown.
申请公布号 EP0251767(A3) 申请公布日期 1988.09.07
申请号 EP19870305789 申请日期 1987.06.30
申请人 CANON KABUSHIKI KAISHA 发明人 YONEHARA, TAKAO;OZAKI, MASAHARU
分类号 H01L21/20;H01L21/822;(IPC1-7):H01L21/203;H01L27/12;C30B23/00;C30B25/00;H01L21/205 主分类号 H01L21/20
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