<p>Zinc oxide is applied to a substrate at a low temperature by using a mixture of an organozinc compound and water carried in an inert gas. The resulting zinc oxide film has a relatively low resistivity which can be varied by addition of a group III element.</p>
申请公布号
EP0204563(A3)
申请公布日期
1988.09.07
申请号
EP19860304269
申请日期
1986.06.04
申请人
ATLANTIC RICHFIELD COMPANY
发明人
VIJAYAKUMAR, PATHAM, S.;BLAKER, KIMBERLY A.;WIETING, ROBERT D.;WONG, BOON
