摘要 |
<p>A process for dry sterilization of medical devices and materials in a gas plasma is disclosed. The devices and materials are placed in a basket (25) resting on rails (27) that support the basket within cylinders (21) and (23). Cylinder (21) is capable of evacuation via evacuation port (31) while cylinder (23) is perforated and disposed within cylinder (21). A suitable RF source is coupled between the grounded outer chamber (21) and perforated inner chamber (23). Gas is supplied within chamber (21) by perforated diffusion tubes (35).</p> |