FILM PEELING METHOD AND APPARATUS

摘要

An apparatus for peeling a film from a substrate is disclosed which comprises: film peeling guide members for setting a direction of peeling of the film; peeling members for peeling off a part of the film and sticking the part onto the film peeling guide members; a film conveying subsystem for supporting the film stuck onto the film peeling guide members and removing the film out of the apparatus; and guide member moving mechanism for causing the film peeling guide members to change their angular positions. Also, a related method is disclosed herein.