| 摘要 |
PURPOSE:To form a brownish coating film having superior corrosion and wear resistances on the surface of each body to be treated, by placing a Ti-Ni mixed evaporating source in a vacuum vessel, introducing gaseous N2 as a reactive gas and treating the body by reactive ion plating. CONSTITUTION:Parts 5 of stainless steel, Ti, nickel silver, glass or the like to be coated are arranged in a vacuum vessel 1 and a Ti-Ni alloy evaporating source 2 consisting of Ti and Ni in (100:5)-(3:1) ratio is placed opposite too the parts 5 with an ionization electrode 3 in-between. After the vessel 1 is evacuated from the exhaust port 6, gaseous N2 as a reactive gas is fed from an introducing pipe 4 and the source 2 is evaporated by heating with a power source 7. At the same time, positive potential is applied to the electrode 3 with a power source 8 to positively ionize the resulting vapor. The ionized vapor is allowed to react with the gaseous N2 and collided against the parts 5 having negative potential applied with a power source 9 to form brownish films consisting of TiN and Ni in 100:1 weight ratio and having superior corrosion and wear resistances on the parts 5.
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