| 摘要 |
<p>PURPOSE:To prevent dust, which is generated during working such as transportation, from sticking on a wafer or a wafer set, by separating a dust-proof cover and a wafer cassette through a mounting member. CONSTITUTION:This device comprises the following parts: a vertical part 10a, a bending horizontal part 10b on an upper side, a dust proof cover 10 preventive of contaminating a wafer and a wafer cassette due to manual operations, a pair of holding members 11 which are disposed separately to be freely exchangeable on the right and left sides of the dust-proof cover 10 and provided with a holding part 8 and a groop part 9, respectively. The holding members 11 are made to engage with a mounting member 12 to be capable of being freely assembled/disassembled, and the vertical part 10a and a grip part 13 formed at a small angle to a parallel are disposed outside the dust-proof cover 10. A wafer cassette handle is held by the use of the grip part 13 with an angle, and both ends of a coupling member 3 of the wafer cassette 2 are hung on the groove 9 of the holding part 8 so as to lift and transport this wafer casette. Hence, dust caused by an operator is prevented from sticking on the wafer so that a contaminated holding member can be quickly exchanged.</p> |
