| 发明名称 |
Alignment reticle for a semiconductor wafer stepper system and method of use |
| 摘要 |
In a semiconductor wafer stepper system, a reticle having an alignment mark positioned adjacent the center thereof and utilized to align each wafer in the stepper system, as well as to adjust the stepper software of the system.
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| 申请公布号 |
US4768883(A) |
申请公布日期 |
1988.09.06 |
| 申请号 |
US19860928067 |
申请日期 |
1986.11.07 |
| 申请人 |
MOTOROLA INC. |
发明人 |
WALDO, WHITSON G.;GENDUSO, LAWRENCE M. |
| 分类号 |
G03F9/00;(IPC1-7):G01B11/00 |
主分类号 |
G03F9/00 |
| 代理机构 |
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