| 摘要 |
PURPOSE:To improve cutting efficiency by drawing air out of a closed space formed of a shutter plate arranged around a cutting edge and an object to be cut with a vacuum pump so that the amount of cutting deformation of the object to be cut can be kept small. CONSTITUTION:Holding a support stick 4, a cutting edge 1 and a seal member 14 on the circumference of a shutter plate 16 are brought into contact with a cover glass 11. When air in a quasi-closed space 12 is drawn out with a vacuum pump 2, a contact force between the edge 1 and the glass 11 increases. Moving and controlling the stick 4 so that the edge 1 comes to a specified position, a disk 5 and the edge 1 are rotated with a motor 6 to cut an object to be cut. When the object to be cut is cut down to a solar cell 7, the motor 6 is stopped, the pump 2 is stopped, and a cutting device for a soft structure is removed from the object to be cut. As described above, the object to be cut which is easily deformed can be efficiently cut while keeping its deformation within a small amount.
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