| 摘要 |
PURPOSE:To suppress the irregularity of individual products to be obliquely ground, to detect the end point and to automate it by detecting a grinding amount of a substrate by the resistance value of a resistor provided at the side edge position from the heat generating resistor forming position of the substrate. CONSTITUTION:A grinding end point detecting pattern 3 is disposed on the main surface 1a of a substrate, formed as a strip resistor having a predetermined width between a heat generating resistor 2 and the side edge 1c of the substrate, and formed substantially in a U-shape as a whole. A conductor 3a is connected to an external resistance measuring unit to measure the resistance value of the pattern 3 which is varied when the substrate 1 is obliquely ground. Accordingly, the resistance of the pattern 3 is measured, and the grinding is stopped at a position where a predetermined resistance value is designated, thus effectively controlling the thickness of the substrate to the predetermined desired thickness of the substrate. The relationship among the grinding amount, the grinding angle and the resistance value is accurately grasped to automate the oblique grinding. |
