| 摘要 |
PURPOSE:To easily prepare a signal electrode terminal and to drive each of ultrasonic vibrators electrically independently, by arranging the ultrasonic vibrators in an array form and connecting the conductive layer of the boundary surface of each of said vibrators to the signal electrode terminal provided to the side surface of a packing member. CONSTITUTION:A signal electrode terminal 15 and the signal wire 16 connected thereto are provided to the side surface of each of acoustic impedance matching packing members 14. Ultrasonic vibrators 10 and the packing members 14 are bonded by conductive layers 13 made of silver in a ceramics green sheet state to form a block wherein both of them are unified. The parts of the vibrators 10 and conductive layers 13 of the block thus constituted are cut at a predetermined pitch by a rotary cutter to obtain such a structure that the vibrators 10 are arranged in an array form. As a result, the signal electrode terminal 15 of each vibrator 10 of the array structure can be easily manufactured on the packing member 14 and each vibrator 10 can be driven electrically independently. |
