| 摘要 |
PURPOSE:To provide a magnetic layer having an excellent magnetic characteristc, electromagnetic converting characteristic and running durability by depositing by evaporation metallic atom at a specific incident angle on a nonmagnetic base plate, forming a thin magnetic film of columnar grains contg. Co, Ni and Cr, exposing the same to a glow discharge atmosphere in environment contg. water and nitrogen and forming an oxide layer. CONSTITUTION:A thin magnetic film of a prescribed compsn. is formed on a base body by a so-called diagonal vapor deposition method. The thin magnetic film consists essentially of Co, and if necessary Ni and/or Cr is incorporated therein. If Ni is incorporated therein, the weight ratio of Co/Ni, is >=1.5. When Cr is incorporated therein, the improvement in the electromagnetic characteristic, output S/N and film strength is resulted. The weight ratio of Cr/Co or Cr/ (Co+Ni) is 0.001-0.1, more preferably 0.005-0.05. The min. value of the incident angle of the vapor deposition material to the normal of the base body is >=20 deg.. The environment of glow discharge contains water and nitrogen and the total pressure thereof is set at about 5X10-1X20<-2> Pa. |
