A PROJECTION EXPOSURE APPARATUS,申请号GB19840032300-传众专利搜索

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发明名称	A PROJECTION EXPOSURE APPARATUS
摘要
申请公布号	GB2153543(B)	申请公布日期	1988.09.01
申请号	GB19840032300	申请日期	1984.12.20
申请人	CANON KABUSHIKI KAISHA	发明人	RYUSHO * HIROSE
分类号	G03F7/20;(IPC1-7):G03B27/54	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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