| 摘要 |
PURPOSE:To uniformly distribute the impurity contg. not only in the lengthwise direction but in the radial direction as well, by improving the positions of the plural circulating holes provided at the bottom of the inner crucible of the double crucible. CONSTITUTION:Doping is carried out by using a liq. capsule method, and a semiconductor is produced by the double-crucible method. Plural circulating holes 6 and 7 are provided at the bottom of the inner crucible 2 of the double crucible. At least one innermost circulating hole 6 is provided at the distance of (0-1/5)r from the center of the bottom where (r) is the radius of the crystal 5 to be pulled up. In addition, the outermost circulating hole 7 is provided at the distance of (4/5-1)r.
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