| 摘要 |
PURPOSE:To control the amount of spacers to be scattered by scattered by attracting insulating particulates to be scattered which are present at a 1st place to a 2nd electrode with an electrostatic force, and holding the 1st and 2nd electrodes at the same potential thereafter at a 2nd place. CONSTITUTION:A device (carrier) is provided which has the 1st electrode 4 made of a conductive material and a 2nd electrode 6 provided with the electrode 4 via an insulator and made of a conductive material. This carrier is moved to the 1st place where there is a receiving disk stored with spacers 2 which are insulating particulates, the electrode 4 gives a potential difference from the ground to attract spacers nearby the electrode 6 to the electrode 6 with electrostatic force, and the amount of the attracted spacers 2 is controllable according to the potential difference given to the electrode 4. Then the carrier in the state where the spacers 2 are still attracted to the electrode 6 with the electrostatic force is moved to the 2nd place where there is substrate 3, and the electrode 4 and 6 are short-circuited to drop and scatter the spacers and over the substrate.
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