发明名称 Testing member capable of selecting a reflection factor
摘要 In a calibration member for use in calibrating an optical scanner, a first shading layer which is resistant against a predetermined etchant is deposited on a first principal surface of a substrate and covered with a second shading layer soluable by the predetermined etchant. The second shading layer alone is selectively etched by the predetermined etchant to leave a predetermined pattern on the first shading layer. An antireflection layer may be interposed between the first shading layer and the predetermined pattern. Alternatively, the predetermined pattern may be covered with an antireflection pattern etched together with the second shading layer. Similar structure may be formed on a second principal surface of the substrate.
申请公布号 US4767660(A) 申请公布日期 1988.08.30
申请号 US19870017525 申请日期 1987.02.24
申请人 HOYA CORPORATION 发明人 HOSODA, KEIJI;OZEKI, MASAAKI
分类号 H01L21/66;G01N21/88;G01N21/93;G01N21/94;G01N21/956;G03F7/00;H01L21/027;(IPC1-7):G01J1/02;B32B3/00;B44C1/22;C23F1/02 主分类号 H01L21/66
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