发明名称 |
Testing member capable of selecting a reflection factor |
摘要 |
In a calibration member for use in calibrating an optical scanner, a first shading layer which is resistant against a predetermined etchant is deposited on a first principal surface of a substrate and covered with a second shading layer soluable by the predetermined etchant. The second shading layer alone is selectively etched by the predetermined etchant to leave a predetermined pattern on the first shading layer. An antireflection layer may be interposed between the first shading layer and the predetermined pattern. Alternatively, the predetermined pattern may be covered with an antireflection pattern etched together with the second shading layer. Similar structure may be formed on a second principal surface of the substrate.
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申请公布号 |
US4767660(A) |
申请公布日期 |
1988.08.30 |
申请号 |
US19870017525 |
申请日期 |
1987.02.24 |
申请人 |
HOYA CORPORATION |
发明人 |
HOSODA, KEIJI;OZEKI, MASAAKI |
分类号 |
H01L21/66;G01N21/88;G01N21/93;G01N21/94;G01N21/956;G03F7/00;H01L21/027;(IPC1-7):G01J1/02;B32B3/00;B44C1/22;C23F1/02 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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