DEFECT INSPECTING DEVICE

摘要

PURPOSE:To perform inspection without any irregularity in sensitivity by correcting foreign matter information which is detected photoelectrically according to transmissivity characteristics corresponding to the angle of light incidence on a light-transmissive substrate (e.g. pellicle) provided nearly in parallel to a substrate to be inspected (e.g. reticle). CONSTITUTION:Laser light 100 from a laser 11 is made incident on the pellicle 2a through half-mirrors 12 and 13 and a mirror 15 and photodetecting elements 3 and 4 measure the quantities of transmitted light 106 and reflected light 105 respectively. The pellicle 2a is rotated on an axial l1 and light transmissivity and a reflection factor corresponding to an angle theta of incidence are measured and stored. Then laser light passed through the prism 12 and a mirror 19 scans on the reticle 22 with the pellicle 23a through a scanning mirror 20 and a lens 21. Photodetecting elements 25 and 27 detect scattered light from foreign matter on the surface of the reticle 22. Their detection results are corrected with the measured and stored transmissivity according to the angle of light incidence on the pellicle 23a. Then there is no irregularity in sensitivity with the scanning position.